The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2001
Filed:
Mar. 22, 1999
Zhiyi Yu, Gilbert, AZ (US);
Ravindranath Droopad, Tempe, AZ (US);
Corey Daniel Overgaard, Phoenix, AZ (US);
Jamal Ramdani, Gilbert, AZ (US);
Jay A. Curless, Tempe, AZ (US);
Jerald A. Hallmark, Gilbert, AZ (US);
William J. Ooms, Chandler, AZ (US);
Jun Wang, Gilbert, AZ (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A method for fabricating a semiconductor structure comprises the steps of providing a silicon substrate (,) having a surface (,); forming on the surface of the silicon substrate an interface (,) comprising a single atomic layer of silicon, oxygen, and a metal; and forming one or more layers of a single crystal oxide (,) on the interface. The interface comprises an atomic layer of silicon, oxygen, and a metal in the form XSiO,, where X is a metal.