The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2001
Filed:
Jan. 21, 2000
Manabu Honma, Shiroyama-Machi, JP;
Tomohisa Shimazu, Sagamihara, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
In a vertical thermal treatment apparatus wherein a plurality of semiconductor wafers are held in multiple layers within a wafer boat, the wafer boat is mounted onto a turntable at the upper end of a rotational shaft that penetrates from a bottom portion through a shaft hole into a vertical reaction vessel, and the wafers are subjected to a thermal treatment while the wafer boat is rotated; a seal is formed between the rotational shaft and the penetration portion, to restrain the intrusion of gases and moisture into the seal portions from the interior of the reaction vessel and to eliminate adverse effects on the seal materials. The space within a gap between a shaft hole,and a rotational shaft,communicates with a space between a fixing member,and an outer shell member,and a magnetic seal portion,is provided between this fixing member,and the outer shell member,This increases the effective length of the shaft hole,from the reaction vessel to the magnetic seal portion,preventing the intrusion of gases and moisture into the magnetic seal portion,from the reaction vessel during reduced-pressure CVD and also alleviating the effects of heat from the reaction vessel which is heated to a high temperature by a heating furnace,thus preventing deterioration of the magnetic fluid.