The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2001
Filed:
Nov. 02, 1998
Applicant:
Inventors:
Raijiro Koga, Tsuchiura, JP;
Hiromi Tsuruta, Chiba, JP;
Takashi Kumagai, Yokohama, JP;
Gee Hoey, San Jose, CA (US);
Brian J. Brown, Palo Alto, CA (US);
Boris Fishkin, San Carlos, CA (US);
Fred C. Redeker, Fremont, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 2/118 ; B24B 3/300 ;
U.S. Cl.
CPC ...
B24B 2/118 ; B24B 3/300 ;
Abstract
A cleaning cup for holding and cleaning a pad conditioner having a conditioner head, the cleaning cup includes a spray nozzle for spraying a cleaning solution on a top side of the conditioner head. The cleaning cup further includes a plurality of support pins extending upwards from a base of the cleaning cup to receive the conditioner head thereon.