The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2001
Filed:
Jul. 23, 1998
Applicant:
Inventors:
Atsushi Shiokawa, Tokyo, JP;
Matsutaro Miyamoto, Kanagawa-ken, JP;
Hirosi Sobukawa, Kanagawa-ken, JP;
Assignee:
Ebara Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F03B 5/00 ;
U.S. Cl.
CPC ...
F03B 5/00 ;
Abstract
A turbomolecular pump comprising a rotor and a stator housed in a casing and an exhaust mechanism is formed between the rotor and the stator; wherein the turbomolecular pump has a valve body for opening and closing a suction port provided in the casing, and a valve driving mechanism for opening/closing-driving the valve body, wherein the valve driving mechanism is provided integrally with the turbomolecular pump.
Shiokawa, Atsushi. (2001). Turbomolecular pump (U.S. Patent No. 6217278). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6217278
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile