The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2001
Filed:
Jun. 08, 1999
Applicant:
Inventors:
Tzung-Han Lee, Taipei, TW;
Horng-Nan Chern, Tai-Nan County, TW;
Assignee:
United Microelectronics Corp., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/144 ; H01L 2/1302 ;
U.S. Cl.
CPC ...
H01L 2/144 ; H01L 2/1302 ;
Abstract
A method for forming a semiconductor device with avoiding chemical mechanical polishing caused residue on uncompleted fields of wafer edge is disclosed. The method comprising removing all conductive layers and silicon nitride layers on the uncompleted fields, thereby the height of the uncompleted fields will not higher than the height of the semiconductor device.