The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2001
Filed:
Apr. 15, 1998
Applicant:
Inventors:
Abha R. Singh, Garland, TX (US);
Girish Anant Dixit, Plano, TX (US);
Wei-Yung Hsu, Dallas, TX (US);
Guoqiang Xing, Dallas, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/144 ;
Abstract
A method to reduce the effective recess in conductive plugs,by performing an oxide etch or oxide CMP, selective to the conductive material in question. This method can be used for any conductive plug,(e.g. aluminum, tungsten, copper, titanium nitride, etc.). In addition, this method is also applicable in contact, via, and trench (damascene) applications. Furthermore, this process can advantageously be used in logic, SRAM, and DRAM applications.