The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2001
Filed:
Feb. 08, 1999
Chih-Hung Cheng, Hsinchu, TW;
United Microeletronics Corp., Hsinchu, TW;
Abstract
A method for fabricating salicide devices over a substrate is described. The substrate has a gate structure pair in which a first gate structure comprises a first gate and a first stuffed film located on the first gate, and a second gate structure comprises a second gate and a second stuffed film located on the first gate. A first spacer is formed on the sidewall of the first gate structure. A second spacer is formed at the sidewall of the second gate structure. The first and the second stuffed films are removed. The second spacer is etched back so as to form a third spacer lower than the second gate. Salicide layers are formed upon the first and the second gates.