The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2001
Filed:
Dec. 22, 1999
John M. Algots, San Diego, CA (US);
Christopher A. Marchi, San Diego, CA (US);
Frederick G. Erie, Oceanside, CA (US);
Jesse D. Buck, San Marcos, CA (US);
Alexander I. Ershov, San Diego, CA (US);
Palash P. Das, Vista, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an R,mirror in a line narrowing module. Bandwidth is controller by adjusting the curvature of a grating in the line narrowing module. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the R,tilt. Other preferred embodiments include automatic adjustment of the horizontal position of the laser chamber within the resonance cavity. In preferred embodiments, feedback signals from a wavelength monitor are used to position the R,mirror. In other preferred embodiments a separate laser beam reflected off the R,mirror on to a photodiode array is used to position the mirror.