The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2001
Filed:
Mar. 12, 1998
Applicant:
Inventors:
Tatsuya Iwasaki, Kumamoto, JP;
Kiyohisa Tateyama, Kumamoto, JP;
Assignee:
Tokyo Electron Ltd., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F 1/02 ; B08B 7/04 ; C23C 1/600 ;
U.S. Cl.
CPC ...
C23F 1/02 ; B08B 7/04 ; C23C 1/600 ;
Abstract
A substrate treatment device comprises a transporting arm for transporting a substrate within the treatment device, a supporting member, which is disposed on the transporting arm, for supporting the substrate, and a cleaning mechanism, which is installed in the substrate treatment device, for cleaning the supporting member. Since the substrate treatment device is equipped with the cleaning mechanism for cleaning the supporting member, the supporting member can be cleaned as required. Therefore, since the substrate always can be held on a clean supporting member, the particles are prevented from depositing on the rear surface of the substrate.