The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2001
Filed:
Apr. 27, 1999
Akira Ishihara, Tosu, JP;
Kazuyoshi Namba, Hachioji, JP;
Akira Yonemizu, Kumamoto, JP;
Takanori Miyazaki, Kumamoto, JP;
Tokyo Electron Limited, , JP;
Abstract
A drive unit,for driving a brush,is provided on a tip of a rotatable arm,The drive unit,includes a motor,for driving the processing member,having a brush,for rotation and an adjustment mechanism,for adjusting a force to urge the processing member,against a wafer W. With no intermediary of a flexible transmitting means, such as a belt, the processing member,is securely joined to the motor,through a shaft,and driven by the motor,directly. The adjustment mechanism,is constituted by an electromagnetic actuator which includes a stationary element,and a movable element,capable of elevating along the stationary element,The motor,is coupled to the armature,The adjustment mechanism,controls the position of the processing member,with respect to the upward and downward direction as well as the force to urge the processing member,against a wafer W.