The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2001
Filed:
Jun. 14, 1999
Applicant:
Inventors:
Lung-Hsiang Chuang, Shiao-Chia, TW;
Chung-Long Chang, Dou-Liu, TW;
Syun-Ming Jang, Hsin-Chu, TW;
Ying-Chen Chao, Hsin-Chu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 3/00 ;
U.S. Cl.
CPC ...
G01N 3/00 ;
Abstract
A test sample with a film and an underlying substrate representing part of a semiconductor wafer is prepared for a stud pull test by a process that includes maintaining the sample in boiling salt water for a few hours. When an epoxy stud is attached to the film of the sample and the clamped assembly is baked for a about an hour, the stud is firmly attached to the film and in an otherwise conventional pull test, the film breaks loose from the substrate (or the stud breaks from the epoxy) before the stud breaks from the film.