The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2001
Filed:
May. 10, 1999
Applicant:
Inventor:
Chaochieh Tsai, Taichung, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/358 ; H01L 2/348 ; H01L 2/352 ; H01L 2/940 ;
U.S. Cl.
CPC ...
H01L 2/358 ; H01L 2/348 ; H01L 2/352 ; H01L 2/940 ;
Abstract
A wafer for testing a manufacturing process for vias has a large number of vias (millions) formed into strings that have an open circuit resistance if the string contains a defective via and have a resistance of a few thousand ohms if the string is good. A multiplexor circuit is formed on the test wafer and scans the via strings and produces a binary output denoting that the addressed string is good or defective. The addresses are generated off the wafer by a compute and a defective string is readily identified.