The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2000
Filed:
May. 01, 1998
Taiji Kitagawa, Fujisawa, JP;
Mitsugu Sato, Hitachinaka, JP;
Goroku Shimoma, Minori-machi, JP;
Tadanori Takahashi, Hitachinaka, JP;
Naoto Yoshida, Hitachinaka, JP;
Masayuki Yukii, Hitachinaka, JP;
Takanori Ninomiya, Hiratsuka, JP;
Tatsuo Horiuchi, Chigasaki, JP;
Keisuke Kawame, Yokohama, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An electron microscope resolving power evaluation method for evaluating performance of a scanning electron microscope without resorting to visual sensory analysis for minimizing a difference in deterioration with age and in performance among individual scanning electron microscopes. A specimen is prepared by overlaying materials having different emission coefficients of secondary charged particles such as secondary electrons, backscattered electrons, transmitted electrons, etc., a cross-section including an overlaid material part of thin-film layers having known dimensions is mirror-finished, data of a scanning electron microscopical image of the cross-section, including the overlaid material part is obtained, and then the resolving power performance of the scanning electron microscope is evaluated quantitatively by means of frequency analysis, etc.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile