The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2000
Filed:
Jun. 27, 1997
Applicant:
Inventors:
Sadahiro Kishii, Kawasaki, JP;
Ko Nakamura, Kawasaki, JP;
Yoshihiro Arimoto, Kawasaki, JP;
Akiyoshi Hatada, Kawasaki, JP;
Rintaro Suzuki, Kawasaki, JP;
Naruo Ueda, Ageo, JP;
Kenzo Hanawa, Ichihara, JP;
Assignees:
Fujitsu Limited, Kawasaki, JP;
Mitsui Mining & Smelting Co., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438693 ; 438751 ; 438697 ; 134-13 ; 216 89 ;
Abstract
A slurry contains MnO.sub.2 or other manganese oxide as a primary component of abrasive particles. Further, a polishing process using such a manganese oxide abrasive and a fabrication process of a semiconductor device using such a polishing process are disclosed.