The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2000
Filed:
Apr. 02, 1998
Applicant:
Inventors:
Michael David Armacost, Wallkill, NY (US);
Steven Alfred Grundon, Underhill, VT (US);
David Laurant Harmon, Essex, VT (US);
Donald McAlpine Kenney, Shelburne, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
148 333 ; 438713 ; 438732 ; 438733 ; 438978 ; 438947 ;
Abstract
A post-etch structure resulting in the inverse of a sidewall spacer etch, i.e. removal of the spacer. A vertical portion of a film is removed while leaving horizontal portions substantially intact. A facet is left in the film in register with an upper corner formed by the vertical and horizontal portions of the underlying body.
Armacost, Michael. (2000). Selective removal of vertical portions of a film (U.S. Patent No. 6139647). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6139647
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile