The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2000
Filed:
Nov. 13, 1997
Applicant:
Inventors:
Jonathan David Reid, Sherwood, OR (US);
Robert J Contolini, Lake Oswego, OR (US);
John Owen Dukovic, Pleasantville, NY (US);
Assignees:
Novellus Systems, Inc., San Jose, CA (US);
International Business Machines Corp., New York, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
C25B / ;
U.S. Cl.
CPC ...
204282 ; 204283 ; 2042 / ; 2042 / ;
Abstract
An anode includes an anode cup, a membrane and ion source material, the anode cup and membrane forming an enclosure in which the ion source material is located. The anode cup includes a base section having a central aperture and the membrane also has a central aperture. A jet is passed through the central apertures of the base section of the anode cup and through the membrane allowing plating solution to be directed at the center of a wafer being electroplated.