The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2000
Filed:
May. 08, 1998
Applicant:
Inventors:
Shih-Hsun Chiu, Hsinchu Hsien, TW;
Li-Chung Lee, Iian Hsien, TW;
Wei-Sheng Chia, Hua-Lien, TW;
Patrick Cheng, Kaoshiung Hsien, TW;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F28D / ; F25D / ;
U.S. Cl.
CPC ...
622592 ; 16510432 ; 237248 ; 437248 ;
Abstract
A container of coolant used in a NIKON.TM. stepper is utilizing a screw cap to air-tightly close a coolant inlet of the container of coolant. The container of coolant is a closed system except the coolant inlet, a circulative input duct and a circulative output duct.