The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2000
Filed:
Dec. 29, 1997
Applicant:
Inventors:
Kenneth D Schatz, Palo Alto, CA (US);
Brett Huff, Fremont, CA (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
216 38 ; 451 28 ;
Abstract
A method of planarizing comprising providing a substrate having an uneven surface topography, forming a layer on the substrate, wherein the layer has a graded resistance to polishing, and polishing the layer.