The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2000
Filed:
Sep. 30, 1998
Applicant:
Inventors:
James David Moore, Tualatin, OR (US);
James M Hannan, Portland, OR (US);
Jeffrey S McMullin, Portland, OR (US);
Assignee:
Credence Systems Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ; G01R / ;
U.S. Cl.
CPC ...
3241581 ; 324754 ; 29829 ;
Abstract
A thermal isolation plate for a probe card comprises a stiff, generally annular plate made of a metal having good thermal conductivity. One surface of the plate has a low emissivity and the opposite surface has a low absorptivity. Preferably the surface of low absorptivity is a highly polished surface.