The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2000
Filed:
Oct. 30, 1997
Ronald J Nagahara, San Jose, CA (US);
Dawn M Lee, Morgan Hill, CA (US);
LSI Logic Corporation, Milpitas, CA (US);
Abstract
A substrate holder assembly for forming a substantially uniformly polished substrate surface during chemical-mechanical polishing is described. The substrate holder assembly includes a carrier film having: (A) a porous layer with (i) a first surface with an outwardly protruding dome shaped region that applies pressure on at least a portion of the substrate surface during chemical-mechanical polishing and a location of the protruding dome shape is aligned with a location of an area of substrate surface that is likely to be underpolished, (ii) a second surface facing a contact surface of a backing plate; and (B) a pressure sensitive adhesive backing layer for affixing the carrier film to the contact surface of the backing plate under sufficient pressure.