The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2000
Filed:
Dec. 11, 1998
Applicant:
Inventors:
Leonard Elliott Klebanoff, San Ramon, CA (US);
Daniel John Rader, Lafayette, CA (US);
Assignee:
EUV LLC, Santa Clara, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B25J / ; B66C / ; H01L / ;
U.S. Cl.
CPC ...
219228 ; 294 641 ; 279-3 ; 269 21 ; 219521 ;
Abstract
A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.