The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2000

Filed:

Aug. 12, 1997
Applicant:
Inventors:

Hiroshi Toyoda, Austin, TX (US);

Jun-ichi Wada, Yokohama, JP;

Masahiko Hasunuma, Yokohama, JP;

Hisashi Kaneko, Fujisawa, JP;

Assignee:

Kabushiki Kaisha Toshiba, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
257762 ; 257751 ; 257761 ; 257771 ; 438688 ; 438687 ; 438653 ; 438656 ;
Abstract

An electric solid state device comprises a substrate, an amorphous thin film formed on the substrate, and a conductive thin film formed on the amorphous thin film. In this device, an interatomic distance calculated from a peak position of a halo pattern appearing in diffraction measurement of the material of the amorphous thin film is substantially equal to an interplanar space between those two adjacent specific crystal planes of the material of the conductive thin film, which are defined at least by respective atomic strings arranged in a predetermined direction in the respective planes and separated from each other by the smallest interatomic distance possible.


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