The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2000
Filed:
Jul. 30, 1998
Hiroshi Kakibayashi, Nagareyama, JP;
Yasuhiro Mitsui, Fuchu, JP;
Hideo Todokoro, Nishi-tama-gun, JP;
Katsuhiro Kuroda, Hachiouji, JP;
Masanari Koguchi, Kodaira, JP;
Kazutaka Tsuji, Hachiouji, JP;
Tatsuo Makishima, Katsushika-ku, JP;
Mikio Ichihashi, Kodaira, JP;
Shigeto Isakozawa, Hitachinaka, JP;
Ruriko Tsuneta, Kokubunji, JP;
Kuniyasu Nakamura, Musashino, JP;
Kensuke Sekihara, Musashimurayama, JP;
Jun Motoike, Hachiouji, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen are carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. A scanning transmission electron microscope has an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons.