The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2000
Filed:
Feb. 12, 1999
Applicant:
Inventors:
Timothy A Strodtbeck, Boise, ID (US);
John S Molebash, Meridian, ID (US);
Bruce L Hayes, Boise, ID (US);
Rex A Smith, Boise, ID (US);
Shawn D Davis, Meridian, ID (US);
Assignee:
Micron Technology, Inc., Boise, ID (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ; C23F / ;
U.S. Cl.
CPC ...
118729 ; 118728 ; 118729 ; 118668 ; 118500 ; 269 21 ; 269292 ; 156345 ; 20429815 ;
Abstract
A wafer support including a plate having a top surface and a lift element opening extending trough said plate. The support also includes a support member adjacent the top surface having a proximal end, a distal end and a bore from the proximal to the distal end and a vacuum source in communication with the bore. The support furthermore includes a lift element having a contacting end disposed through the lift element opening and a drive coupled to at least one of the plate and the lift element.