The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2000
Filed:
Dec. 15, 1997
Applicant:
Inventors:
Assignee:
Ebara Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
95133 ; 95281 ; 95290 ; 96230 ;
Abstract
A trapping device that performs a regeneration operation efficiently so as to raise the overall operational reliability by improving the service life as well as to lower the capital and operation cost of the processing system. The trapping device includes an exhaust path for evacuating a spent gas from a hermetic chamber through a vacuum pump; a trap section for trapping component substances from the spent gas flowing through the exhaust path; a cleaning path disposed adjacent to the exhaust path for flowing a cleaning solution for cleaning the trap section; and driving device for transposing the trap section to communicate either with the exhaust path or with the cleaning path.