The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2000
Filed:
Jul. 31, 1998
Eiichi Toya, Yamagata, JP;
Masahiko Ichishima, Kanagawa, JP;
Tomio Konn, Yamagata, JP;
Tomohiro Nagata, Yamagata, JP;
Shigeru Yamamura, Yamagata, JP;
Norihiko Saito, Yamagata, JP;
Kouji Teraoka, Saitama, JP;
Takeshi Inaba, Yamagata, JP;
Hiroyuki Honma, Yamagata, JP;
Ken Nakao, Kanagawa, JP;
Takanori Saito, Kanagawa, JP;
Hisaei Osanai, Kanagawa, JP;
Toshiyuki Makiya, Tokyo, JP;
Toshiba Ceramics Co., Ltd., Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A carbon heater comprising heater members (11, 111, 121 . . . 161, 212, 222, 315, 325 . . . 345, 411, 515, 612) in which a plurality of carbon fiber bundles having a plurality of carbon fibers whose diameter is 5 to 15 .mu.m bundled are woven into a longitudinally elongated shape such as a wire shape or a tape shape and the impurity content is less than 10 ppm in ashes.