The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2000
Filed:
May. 21, 1997
Applicant:
Inventors:
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438778 ; 438778 ; 438238 ; 438384 ; 438385 ; 438928 ; 438488 ; 257903 ; 257904 ;
Abstract
The present invention is a method for preventing backside polysilicon peeling in 4T+2R SRAM process. This invention utilizes forming oxide cap layer on the backside of the wafer to protect the backside polysilicon. Thus, the backside polysilicon is free from peeling and damage.