The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2000
Filed:
Aug. 13, 1998
Yu-Hua Lee, Hsinchu, TW;
James (Cheng-Ming) Wu, Kao-Hsiung, TW;
Taiwan Semiconductor Manufacturing Company, Hsin-Chu, TW;
Abstract
A process for forming a crown shaped, polysilicon storage node structure, for a DRAM capacitor structure, has been developed. The process features the deposition of a polysilicon layer, on the top surface of a thick insulator layer, as well as on all surfaces of an opening, in the thick insulator layer. Removal of the regions of polysilicon, residing on the top surface of the thick insulator layer, results in a crown shaped, polysilicon storage node structure, in the opening, in the thick insulator layer. The crown shaped, polysilicon storage node structure, was protected from the polysilicon removal procedure, by a photoresist plug, formed overlying the polysilicon layer, in the opening, in the thick insulator layer. The photoresist plug was formed via photoresist application, exposure, and the development of exposed photoresist regions.