The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 1999
Filed:
Jan. 22, 1999
Susumu Maeda, Hiratsuka, JP;
Keisei Abe, Chiyoda-ku, JP;
Kazutaka Terashima, Ebina, JP;
Hideo Nakanishi, Shinjuku-ku, JP;
Komatsu Electronic Metals Co., Ltd., Hiratsuka, JP;
Mitsubishi Materials Silicon Corporation, Tokyo, JP;
Kagaku Gijutsu Sinkou Jigyo Dan, Kawaguchi, JP;
Toshiba Ceramics Co., Ltd., Tokyo, JP;
Abstract
A temperature sensor 42 is provided in a furnace 11, measuring temperature above a molten liquid 24 put in a crucible 12 to check proceedings of evaporation of oxygen vaporized from a free surface 44 of the molten liquid 24. From the data, and considering the relation with the oxygen dissolved into the crucible 12, the oxygen concentration in the molten liquid 24 can be found and the amount of oxygen taken into a single silicon crystal 40 pulled up from the molten liquid 24 can be figured out.