The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 1999
Filed:
Apr. 07, 1998
Applicant:
Inventors:
Martin Weber, Bad Durrheim, DE;
John Oshinowo, Schwennigen, DE;
Assignee:
STEAG MicroTech GmbH, Pliezhausen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134135 ; 134155 ; 134184 ; 134902 ; 134186 ;
Abstract
A device for treating substrates includes a fluid container in which the substrates are contained during treatment. A nozzle system is connected to the sidewalls and/or bottom of the fluid container and includes a plurality of nozzles for introducing a fluid into the fluid container.
Weber, Martin. (1999). Device for treating substrates in a fluid container (U.S. Patent No. 5992431). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5992431
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile