The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 1999
Filed:
Jun. 30, 1997
Applicant:
Inventors:
Wei Xiong, New City, NY (US);
Hung-Lee Hoo, Livingston, NJ (US);
Assignees:
Sony Corporation, Tokyo, JP;
Materials Research Corporation, Orangeburg, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11B / ;
U.S. Cl.
CPC ...
428 653 ; 428 657 ; 428336 ; 428408 ; 428701 ; 428702 ; 428611 ; 428666 ; 428667 ; 428693 ; 428698 ; 4286 / ; 4286 / ; 4286 / ; 4286 / ; 428900 ; 427127 ; 427128 ; 427130 ; 427131 ; 2041922 ; 75232 ; 75234 ; 75245 ; 75246 ;
Abstract
Chromium-tantalum oxides (Cr-TaO.sub.x), including chromium-tantalum pentoxide (Cr-Ta.sub.2 O.sub.5), chromium-tantalum tetrioxide (Cr-Ta.sub.2 O.sub.4 or Cr-TaO.sub.2), sputtering targets containing them, and their manufacture are disclosed. The targets are characterized by high density, uniform TaO.sub.x distribution, low impedance and stable plasma during the sputtering. The Cr-Ta oxides are used as a thin film sublayer to improve the coercivity and other characteristics of magnetic recording media deposited on metallic or non-metallic substrates used in hard disks for data storage.