The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 1999
Filed:
May. 08, 1998
Chih-Yuan Ke, Hsin-Chu, TW;
Tung-Li Lee, Hsin-chu, TW;
Chien-Rong Huang, Hsinchu, TW;
Sheng-Kuo Huang, Hsin Chu, TW;
Taiwan Semiconductor Manufacturing Co. Ltd., Hsin-Chu, TW;
Abstract
The present invention discloses a frictional mount for engaging a monitor to a process chamber by utilizing a base member that has at least three apertures therethrough adapted for mounting at least one monitor and two fastening devices, a compressible member formed of a deformable material that has at least three apertures adapted for the at least one monitor and the two fastening devices to pass through, the compressible member is positioned in intimate contact with the base member, and a pressing member that is in intimate contact with the compressible member and has at least one aperture adapted for the at least one monitor to be mounted therethrough and two apertures adapted for receiving two fastening devices such that when the two fastening devices are engaged, the compressible member expands in a lateral direction and frictionally engages the internal peripheral surfaces of a recessed window in the process chamber.