The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 1999
Filed:
Nov. 07, 1997
Applicant:
Inventors:
Masami Akimoto, Kumamoto, JP;
Yoichi Deguchi, Machida, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03D / ; B65G / ;
U.S. Cl.
CPC ...
396604 ; 414225 ; 414935 ;
Abstract
A processing apparatus comprises a plurality of processing sets, each set including a transport path extending vertically, a plurality of processing sections which are provided around the transport path and each have a plurality of processing units laid one on top of another vertically, which each perform a specific process on objects, and a main transport mechanism which moves along the transport path, loads the objects on and unloads the objects from each processing unit in the plurality of processing sections, and an inter-set transport mechanism for transporting objects between the adjacent processing sets.