The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 1999
Filed:
Apr. 12, 1996
Applicant:
Inventors:
Susumu Kato, Yamanashi-ken, JP;
Masahito Ozawa, Yamanashi-ken, JP;
Sunao Muraoka, Yamanashi-ken, JP;
Assignees:
Tokyo Electron Ltd., Tokyo-to, JP;
Varian Japan K.K.T, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
L23C / ;
U.S. Cl.
CPC ...
118719 ; 20429825 ; 20429835 ; 156345 ; 414217 ; 414939 ; 251326 ; 251329 ;
Abstract
A gas is supplied to a second chamber so that the pressure in the second chamber is raised to a predetermined level. A communication passage is provided for internally connecting the first and second chambers. When the pressure in the first chamber attains the predetermined level, the gas is allowed to flow from the second chamber into the first chamber through the communication passage. A gas flow can be checked when an open-close door is opened to connect the chambers. Thus, there is no substantial gas flow, so that particles can be prevented from being flung up.