The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 1999
Filed:
Oct. 04, 1996
Applicant:
Inventors:
Lee H Veneklasen, Castro Valley, CA (US);
Rudy F Garcia, Newark, CA (US);
Assignee:
Etec Systems, Inc., Hayward, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ; G01J / ;
U.S. Cl.
CPC ...
257429 ; 25037001 ; 25037008 ; 25037009 ; 257428 ; 257680 ; 378189 ;
Abstract
A solid state electron or x-ray detector is mounted within the time-varying magnetic deflection fields of a charged particle beam system. A minimum volume of high resistivity conductors and insulating materials are used in the mounting to minimize eddy currents that otherwise cause dynamic deflection distortions. Segmented conductive elastomer members make electrical and mechanical contact with the active surface of the detector. A flexible PC board connects the detector active areas to external signal processing electronics.