The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 1999
Filed:
Jul. 26, 1996
Applicant:
Inventors:
Michael G Lee, San Jose, CA (US);
Solomon I Beilin, San Carlos, CA (US);
William T Chou, Cupertino, CA (US);
Michael G Peters, San Clara, CA (US);
Wen-chou Vincent Wang, Cupertino, CA (US);
Assignee:
Fujitsu Limited, Hong Kong, US;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; H05K / ;
U.S. Cl.
CPC ...
216 99 ; 216 41 ; 216100 ; 216108 ; 438597 ; 438619 ; 438753 ; 438756 ; 438757 ;
Abstract
Methods of wet etching through a silicon substrate using composite etch-stop layers are disclosed. In one embodiment, the composite etch stop comprises a layer of silicon dioxide and a layer of polyimide.