The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 02, 1999

Filed:

Jul. 26, 1996
Applicant:
Inventors:

Hiroshi Kakibayashi, Nagareyama, JP;

Yasuhiro Mitsui, Fuchu, JP;

Hideo Todokoro, Nishi-tama-gun, JP;

Katsuhiro Kuroda, Hachiouji, JP;

Masanari Koguchi, Kodaira, JP;

Kazutaka Tsuji, Hachiouji, JP;

Tatsuo Makishima, Katsushika-ku, JP;

Mikio Ichihashi, Kodaira, JP;

Shigeto Isakozawa, Hitachinaka, JP;

Ruriko Tsuneta, Kokubunji, JP;

Kuniyasu Nakamura, Musashino, JP;

Kensuke Sekihara, Musashimurayama, JP;

Jun Motoike, Hachiouji, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250311 ;
Abstract

A scanning transmission electron microscope including an electron detection system having a scattering angle limiting aperture (for the inner angle) and a scattering angle limiting aperture (for the outer angle) between a specimen and an electron detector (comprising a scintillator and a light guide) and only one electron detector is installed.


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