The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 1999
Filed:
Nov. 14, 1997
Hideo Todokoro, Tokyo, JP;
Kenji Takamoto, Ome, JP;
Tadashi Otaka, Katsuta, JP;
Fumio Mizuno, Tokorozawa, JP;
Satoru Yamada, Ome, JP;
Sadao Terakado, Katsuta, JP;
Katsuhiro Kuroda, Hachioji, JP;
Ken Ninomiya, Higashimatsuyama, JP;
Tokuo Kure, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An electron beam which can transmit through part of a specimen and can reach a portion not exposing to the electron beam is irradiated and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A cubic model is assumed, the cubic model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified cubic model.