The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 1998
Filed:
Jun. 06, 1995
Applicant:
Inventors:
Wesley Charles Natzle, New Paltz, NY (US);
Jin Jwang Wu, Ossining, NY (US);
Chienfan Yu, Highland Mills, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B / ; H01L / ;
U.S. Cl.
CPC ...
134-7 ; 438906 ;
Abstract
A film layer not susceptible to aerosol cleaning is removed from a surface by converting the film layer into a film susceptible to aerosol cleaning, and aerosol jet cleaning the converted film and any contaminants. The aerosol jet can be moved in relation to the surface to provide thorough cleaning.