The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 1998
Filed:
Apr. 21, 1997
Kun-Zen Chang, Hsinchu, TW;
Ching-Yuan Lin, Hsinchu, TW;
Etron Technology, Inc., Hsinchu, TW;
Abstract
A method for forming an ESD protection device, with reduced junction breakdown voltages, while simultaneously forming an integrated circuit, containing FET devices, has been developed. This invention features forming a large area, ESD protection diode, by using a first ion implantation step, of a specific conductivity type, also used for the heavily doped source and drain regions of attached FET devices. After photoresist processing, used to mask the attached FET devices, a second ion implantation step, opposite in conductivity type then the first implant, is used to complete the ESD protection diode, for the ESD protection device. This large area diode reduces junction breakdown voltage, while allowing ESD current to be discharged more efficiently then for smaller ESD protection counterparts.