The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 1998
Filed:
Dec. 13, 1996
Applicant:
Inventors:
David Trost, San Francisco, CA (US);
Lee Veneklasen, Castro Valley, CA (US);
Assignee:
Etec Systems, Inc., Hayward, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G05G / ; F16C / ; F16J / ;
U.S. Cl.
CPC ...
7449009 ; 74 182 ; 25044211 ; 2504922 ; 277-3 ; 2772 / ; 384 12 ;
Abstract
A vacuum compatible linear motion device having a fluid bearing is contained within a vacuum chamber having a working pressure of significantly less than one atmosphere. The fluid bearing is contained within a vacuum enclosure within the vacuum chamber and is maintained at a pressure higher than that of the vacuum chamber but less than one atmosphere, thus essentially isolating the fluid bearing. A moveable payload is coupled to the linear motion device such that linear motion in the direction of the long axis of the device is provided to the moveable payload.