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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 5783491 B1

PDFFull Text
Date of Patent:
Jul. 21, 1998

Filed:

Feb. 02, 1995

Method of forming a truck mos gate or a power semiconductor device

Applicant:
Inventors:

Katsumi Nakamura, Itami, JP;

Tadaharu Minato, Itami, JP;

Shuuichi Tominaga, Fukuoka, JP;

Katsuomi Shiozawa, Amagasaki, JP;

Assignee:

Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;

Attorney:

Oblon, Spivak, McClelland, Maier & Neustadt, P.C.

Primary Examiner:

Brian Dutton

Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
438702 ; 438386 ; 438404 ;
Abstract

A method of fabricating a semiconductor device which includes the steps of forming a trench (4), and repeating the formation and removal of an oxide film (a sacrificial oxide film) twice to provide a rounded configuration (5b) of an opening portion of the trench (4) and a rounded configuration (6b) of a bottom thereof and to draw defects in a semiconductor layer into a silicon oxide film (8), reducing the defects adjacent the inner wall of the trench (4), whereby electric field concentration on a gate is prevented and the mobility of carriers in channels is improved for an improvement in characteristic, particularly an on-state voltage, of a power device.

Find Patent Forward Citations

Nakamura, Katsumi. (1998). Method of forming a truck mos gate or a power semiconductor device (U.S. Patent No. 5783491). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5783491

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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