The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 1998
Filed:
Aug. 13, 1996
Applicant:
Inventors:
Yasuhiro Niimura, Ayase, JP;
Tetsuma Ikegami, Kawasaki, JP;
Naoya Hanafusa, Yokohama, JP;
Masaru Nakaniwa, Ebina, JP;
Assignee:
Ebara Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B01D / ; B01D / ;
U.S. Cl.
CPC ...
55317 ; 55435 ; 55436 ; 55456 ; 55473 ;
Abstract
A trap for collecting solid is connected to either an exhaust port or a suction port of a vacuum pump for trapping a solid material separated from a sublimed gas discharged by the vacuum pump. The trap includes a casing, a passage defining member disposed in the casing and defining a gas passage in the casing, and an intermediate member disposed between the casing and the passage defining member. The intermediate member is made of a flat thin sheet which is formed into a tubular member, and the tubular member is capable of being spread when taken out from the casing.