The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 1998
Filed:
May. 24, 1995
Applicant:
Inventors:
Young-Chul Jang, Suwon, KR;
Hyo-Seok Choi, Seoul, KR;
Dong-Heui Jang, Suwon, KR;
Sun-Yong Lee, Suwon, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon, KR;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; G01B / ; G06F / ;
U.S. Cl.
CPC ...
364488 ; 364491 ; 36455101 ; 364554 ; 364575 ; 36446815 ; 36446821 ; 36446828 ; 437-8 ; 355 53 ;
Abstract
A method for manufacturing a semiconductor device comprises the steps of extracting an optimal working condition by accumulatively averaging accumulated working conditions of lots previously performed in an expectation process to be currently performed in the manufacturing equipment, extracting a correction condition by extracting information for an alignment state of a lower layer performed by the expectation process, and setting the working condition by adding the correction condition to the optimal working condition.