The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 1997
Filed:
Aug. 02, 1995
Applicant:
Inventor:
Toshiko Nakagawa, Amagasaki, JP;
Assignee:
MEC Co., Ltd., Amagasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F / ; C23F / ;
U.S. Cl.
CPC ...
252 792 ; 216105 ; 252 794 ;
Abstract
An etching solution for copper or copper alloys comprising, (a) sulfuric acid, (b) a persulfate, (c) at least one compound selected from imidazole, imidazole derivatives, pyridine derivatives, triazine, and triazine derivatives, and (d) water. The etching solution exhibits a high etching speed and does not oxidize the copper surfaces after etching.