The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 1997
Filed:
Sep. 12, 1995
Kengo Mizosaki, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Tokyo Electron Kyushu Limited, Tosu, JP;
Abstract
A processing apparatus comprises a carrier rest portion for placing thereon carriers each of which stores a plurality of plate-like target bodies substantially horizontally with gaps therebetween in the vertical direction and which has a front surface forming a target body transfer port and a side surface having a light-transmitting portion, a convey mechanism having a target body holding member which is movable back and forth and movable vertically relative to the carrier rest portion to sequentially extract and transfer target bodies in the carrier to a processing unit, and photocoupler and a mirror, provided to the convey mechanism to oppose each other through part of the target body in the horizontal direction, for detecting presence/absence of a target body in each stage of the carrier on the carrier rest portion.