The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 1997
Filed:
Feb. 14, 1994
Applicant:
Inventors:
Yoichi Deguchi, Machida, JP;
Satoru Kawakami, Sagamihara, JP;
Shiro Koyama, Fuchu, JP;
Kenji Ishikawa, Sagamihara, JP;
Assignee:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; C23F / ; H05H / ;
U.S. Cl.
CPC ...
118728 ; 1187 / ; 1187 / ; 1187 / ; 1187 / ; 156345 ; 31511121 ; 31511131 ; 31511151 ; 427488 ; 427535 ; 427569 ; 427571 ;
Abstract
A static chuck and a workpiece push-up pin are disposed on a susceptor which is one of opposed electrodes generating plasma. The push-up pin and the susceptor are electrically connected. A grounding circuit which discharges electric charges remaining on the susceptor is disposed in parallel with an RF power supply circuit which supplies RF power to the susceptor. Thus, electric charges remaining in the power supply circuit can be discharged and an abnormal discharging between the push-up pin and the susceptor can be prevented.