The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 1997
Filed:
Aug. 25, 1994
Applicant:
Inventors:
Chi-Fung Lo, Fort Lee, NJ (US);
John Turn, Chestnut Ridge, NY (US);
David P Strauss, Glen Rock, NJ (US);
Assignees:
Sony Corporation, Tokyo, JP;
Materials Research Corporation, Gilbert, AZ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B22F / ; C04B / ;
U.S. Cl.
CPC ...
264113 ; 264109 ; 264332 ; 264338 ; 264D / ;
Abstract
An apparatus and process for making metal oxide sputtering targets from volatile and thermally unstable metal oxide powder by enveloping the metal oxide powder in at least one layer of a barrier material while the powder is hot-pressed using a graphite die assembly.