The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 1997
Filed:
Dec. 05, 1994
Kawasaki Steel Corporation, Hyogo-ken, JP;
Abstract
Antifuse elements for a semiconductor device comprise a bottom electrode, a top electrode, and an antifuse material layer. The bottom electrode is formed of a conductive material having an amorphous structure. The conductive material contains such elements as W, Ti, or a compound thereof. Since there is no grain boundary on the surface of the bottom electrode having an amorphous structure, any sharp protrusions are diminished to promote the smoothness. The antifuse material film is mounted on the surface of the bottom electrode. The bottom electrode contains such elements having an excellent EM resistance as W, Mo. These elements are also to be contained in a filament which is formed after programming.