The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 1997
Filed:
May. 04, 1995
Applicant:
Inventors:
Recai Sezi, Roettenbach, DE;
Horst Borndoerfer, Erlangen, DE;
Hellmut Ahne, Roettenbach, DE;
Siegfried Birkle, Hoechstadt A/Aisch, DE;
Eberhard Kuehn, Hemhofen, DE;
Rainer Leuschner, Erlangen, DE;
Eva Rissel, Forchheim, DE;
Michael Sebald, Hessdorf-Hannberg, DE;
Assignee:
Siemens Aktiengesellschaft, M unchen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C08F / ; C08F / ;
U.S. Cl.
CPC ...
526271 ; 5263285 ; 5263297 ;
Abstract
New mixed polymers which can serve as base polymers for high-resolution resists are structured from 40 to 99 mole % of a tert. butyl ester of an unsaturated carboxylic acid and 1 to 60 mole % of an anhydride of an unsaturated carboxylic acid.